DIFFUSION MECHANISM IN BULK SILICIDES - RELATION WITH THIN-FILM BEHAVIOR (CASE OF NI2SI FORMATION)

被引:11
作者
GAS, P
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D O I
10.1016/0169-4332(89)90534-5
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O64 [物理化学(理论化学)、化学物理学];
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070304 ; 081704 ;
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页码:178 / 184
页数:7
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共 20 条
[1]  
Adda Y., 1966, DIFFUSION SOLIDS
[2]   RADIOACTIVE N NI-STAR TRACER STUDY OF THE NICKEL SILICIDE GROWTH-MECHANISM [J].
BAGLIN, JEE ;
ATWATER, HA ;
GUPTA, D ;
DHEURLE, FM .
THIN SOLID FILMS, 1982, 93 (3-4) :255-264
[3]   IDENTIFICATION OF DOMINANT DIFFUSING SPECIES IN SILICIDE FORMATION [J].
CHU, WK ;
KRAUTLE, H ;
MAYER, JW ;
MULLER, H ;
NICOLET, MA ;
TU, KN .
APPLIED PHYSICS LETTERS, 1974, 25 (08) :454-457
[4]  
CICCARIELLO JC, IN PRESS P DIMETA 88
[5]   Kinetics of formation of silicides: A review [J].
d'Heurle, F. M. ;
Gas, P. .
JOURNAL OF MATERIALS RESEARCH, 1986, 1 (01) :205-221
[6]  
ELSAIED, 1984, ACTA METALL, V32, P907
[7]   ISOTOPE-SEPARATION DURING SILICIDE FORMATION BY SOLID-STATE REACTION AND ITS RELATION WITH THE GROWTH LIMITING MECHANISM [J].
GAS, P ;
ZARING, C ;
PETERSSON, CS ;
SVENSSON, BG ;
OSTLING, M .
APPLIED SURFACE SCIENCE, 1989, 38 (1-4) :196-196
[8]  
GAS P, 1986, ADV MATERIALS TELECO, P493
[9]  
GAS P, 1988, ACTA METALL, V37, P17
[10]   INFLUENCE OF DISLOCATIONS ON DIFFUSION KINETICS IN SOLIDS WITH PARTICULAR REFERENCE TO ALKALI HALIDES [J].
HARRISON, LG .
TRANSACTIONS OF THE FARADAY SOCIETY, 1961, 57 (08) :1191-&