DYNAMICS OF EXCIMER-LASER ABLATION OF THIN TUNGSTEN FILMS MONITORED BY ULTRAFAST PHOTOGRAPHY

被引：39

作者：

TOTH, Z ^{[1
]}

HOPP, B ^{[1
]}

KANTOR, Z ^{[1
]}

IGNACZ, F ^{[1
]}

SZORENYI, T ^{[1
]}

BOR, Z ^{[1
]}

机构：

[1] ATTILA JOZSEF UNIV,DEPT OPT & QUANTUM ELECTR,H-6720 SZEGED,HUNGARY

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1995年 / 60卷 / 05期

关键词：

D O I：

10.1007/BF01538765

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The time course of laser light induced transport of tungsten films from a glass support is followed by ultrafast photography using delayed dye laser pulses. The photographs provide unambiguous evidence that the material transport in the 40-200 mJ/cm(2) intensity domain takes place via removal of solid pieces from the film material. These results are consistent with heat flow calculations which predict the overall melting of the metal layer above 380 mJ/cm(2). The series of photographs presented give detailed insight into the melting process and have revealed an unexpected in-flight phase separation of solid fracture pieces and molten droplets throughout the 200-900 mJ/cm(2) domain. The faster propagating molten droplets form a condensed halo in front of the solid pieces, thereby providing an efficient shield between the processing laser light and the solid phase.

引用

页码：431 / 436

页数：6

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