STICKING COEFFICIENT OF THE SIH2 FREE-RADICAL ON A HYDROGENATED SILICON-CARBON SURFACE

被引：26

作者：

ROBERTSON, RM

ROSSI, MJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 02期

关键词：

D O I：

10.1063/1.101442

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：185 / 187

页数：3

共 13 条

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