RESIDUAL IMPURITIES IN MO-VPE GAAS EPITAXIAL LAYERS

被引：7

作者：

ELJANI, B ^{[1
]}

GRENET, JC ^{[1
]}

LEROUX, M ^{[1
]}

GUITTARD, M ^{[1
]}

GIBART, P ^{[1
]}

CHEVALLIER, J ^{[1
]}

机构：

[1] CNRS,PHYS SOLIDES LAB,F-92190 MEUDON BELLEVUE,FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1984年 / 19卷 / 01期

关键词：

D O I：

10.1051/rphysap:019840019010700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：7 / 15

页数：9

共 30 条

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