TOMOGRAPHIC IMAGING OF MICROMETER-SIZED OPTICAL AND SOFT-X-RAY BEAMS

被引:7
作者
HERTZ, HM [1 ]
BYER, RL [1 ]
机构
[1] STANFORD UNIV,EDWARD L GINZTON LAB,STANFORD,CA 94305
关键词
D O I
10.1364/OL.15.000396
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The knife-edge technique for measurements of micrometer-sized beams is extended to two-dimensional imaging by tomographic reconstruction of multiangular knife-edge data. Two-dimensional intensity distributions at optical (633-nm) and soft-x-ray (13.5-nm) wavelengths at the focal region of a Schwarzschild objective are presented. The resolution is limited by the 200-nm step size used in the data acquisition. © 1990 Optical Society of America.
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页码:396 / 398
页数:3
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