OPTICAL-PROPERTIES OF THIN GEOX FILMS

被引：21

作者：

SHABALOV, AL

FELDMAN, MS

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 83卷 / 01期

关键词：

D O I：

10.1002/pssa.2210830151

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SEMICONDUCTING GERMANIUM COMPOUNDS

引用

页码：K11 / K14

页数：4

共 13 条

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[8] INFRARED STUDIES OF REACTIVELY SPUTTERED SIOX FILMS IN THE COMPOSITION RANGE 0.2-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-1.9 [J].

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[9] OPTICAL AND DIELECTRIC-PROPERTIES OF THIN SIOX FILMS OF VARIABLE COMPOSITION [J].

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