NITRIDATION OF SI(111) BY NITROGEN-ATOMS .2.

被引：66

作者：

SCHROTT, AG ^{[1
]}

FAIN, SC ^{[1
]}

机构：

[1] UNIV WASHINGTON,DEPT PHYS,SEATTLE,WA 98195

来源：

SURFACE SCIENCE | 1982年 / 123卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(82)90323-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：204 / 222

页数：19

共 19 条

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