TRANSMISSION ELECTRON-MICROSCOPY OF ALUMINUM IMPLANTED AND ANNEALED (100) SI - DIRECT EVIDENCE OF ALUMINUM PRECIPITATE FORMATION

被引：35

作者：

SADANA, DK

NORCOTT, MH

WILSON, RG

DAHMEN, U

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

[2] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,NATL CTR ELECTRON MICROSCOPY,BERKELEY,CA 94720

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 18期

关键词：

D O I：

10.1063/1.97404

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1169 / 1171

页数：3

共 13 条

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[8] CRYSTALLOGRAPHIC ORIENTATION RELATIONSHIPS BETWEEN PRIMARY SILICON AND ALUMINUM CRYSTALS [J].

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[9]

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