EXAMINATION OF MBE GAAS/AL0.3GA0.7AS SUPER-LATTICES BY AUGER-ELECTRON SPECTROSCOPY

被引：14

作者：

ERICKSON, LP

PHILLIPS, BF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582523

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：158 / 161

页数：4

共 7 条

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[6] CRATER-EDGE PROFILING IN INTERFACE ANALYSIS EMPLOYING ION-BEAM ETCHING AND AES [J].

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