WEAR AND TEM STUDIES OF PECVD DIAMOND-LIKE-CARBON FILMS

Diamond-like-carbon (D.L.C.) films are characterized by a low friction coefficient, a high wear resistance and a high corrosion resistance. D.L.C. films can be obtained by P.V.D., C.V.D. and duplex techniques with solid or gaseous precursors. Depending on the processing, hydrogen concentration ranges between 0 and 60%. In this study, hydrogenated D.L.C. has been deposited with a radio frequency system (13.56 MHz) onto a steel substrate. Wear was studied by pin-on-disc testing at room temperature with an alumina counterpart. Interrupted tests were carried out to go into wear mechanisms. Debris were collected after various given sliding times for transmission electron microscopy (T.E.M.) in addition to scanning electron microscopy (S.E.M.) applied to the wear tracks.