共 25 条
[2]
ARMIGLIATO A, 1977, SEMICONDUCTOR SILICO, V77, P638
[6]
MODELING OF DOPANT INCORPORATION, SEGREGATION, AND ION SURFACE INTERACTION EFFECTS DURING SEMICONDUCTOR FILM GROWTH BY MOLECULAR-BEAM EPITAXY AND PLASMA-BASED TECHNIQUES
[J].
APPLICATIONS OF SURFACE SCIENCE,
1985, 22-3 (MAY)
:520-544
[8]
HARMAN MA, 1989, SPRINGER SERIES MATE, V7, pCH9