NEW ANODIC NATIVE OXIDE OF GAAS WITH IMPROVED DIELECTRIC AND INTERFACE PROPERTIES

被引:130
作者
HASEGAWA, H [1 ]
FORWARD, KE [1 ]
HARTNAGEL, HL [1 ]
机构
[1] UNIV NEWCASTLE, DEPT ELECT & ELECTR ENGN, MERZ LABS, NEWCASTLE NE1 7RU, ENGLAND
关键词
D O I
10.1063/1.87994
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:567 / 569
页数:3
相关论文
共 18 条
[1]  
BURGER RM, 1967, FUNDAMENTALS SILICON, V1, P108
[2]  
CASTAGNE R, 1968, CR ACAD SCI B PHYS, V267, P866
[3]   SURFACE STATES AND INSULATOR TRAPS AT SI3N4-GAAS INTERFACE [J].
COOPER, JA ;
SCHWARTZ, RJ ;
WARD, ER .
SOLID-STATE ELECTRONICS, 1972, 15 (11) :1219-+
[4]   CURRENT UNDERSTANDING OF CHARGES IN THERMALLY OXIDIZED SILICON STRUCTURE [J].
DEAL, BE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (06) :C198-C205
[5]  
FELDMAN LC, 1973, P INT C ION BEAM SUR
[6]   CHARACTERISTICS AND POTENTIAL APPLICATIONS OF GAAS1-XPX MIS STRUCTURES [J].
FORBES, L ;
YEARGAN, JR ;
KEUNE, DL ;
CRAFORD, MG .
SOLID-STATE ELECTRONICS, 1974, 17 (01) :25-29
[7]  
FORWARD KE, UNPUBLISHED
[8]   ELECTRICAL CHARACTERISTICS OF SILICON NITRIDE-GALLIUM ARSENIDE INTERFACE [J].
FOSTER, JE ;
SWARTZ, JM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (11) :1410-+
[9]   GAAS INVERSION-TYPE MIS TRANSISTORS [J].
ITO, T ;
SAKAI, Y .
SOLID-STATE ELECTRONICS, 1974, 17 (07) :751-759
[10]  
ITO T, 1973, T IEEJ A, V93, P11