EFFECT OF HYDROGEN DILUTION OF SILANE ON OPTOELECTRONIC PROPERTIES IN GLOW-DISCHARGED HYDROGENATED SILICON FILMS

被引：8

作者：

SHIRAFUJI, J

NAGATA, S

KUWAGAKI, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 09期

关键词：

D O I：

10.1063/1.335752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3661 / 3663

页数：3

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