SHIFTS OF DILUTE PT IMPURITIES IN AMORPHOUS SI BY ION IRRADIATION

被引：15

作者：

PAINE, BM

NICOLET, MA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

We thank P. Sigmund (Odense University); S. Matteson (Texas Instruments) and U. Shreter (Caltech) for valuable discussions on this work; and R. Fernandez (Caltech) for the sample preparation. The ion irradiation part of the study was supported financially by the U.S. Department of Energy through an agreement with the National Aeronautics and Space Administration; monitored by the Jet Propulsion Laboratory; Caltech (D.B. Bickler). Financial assistance was also provided by the Benevolent U.R. Fund of the B6hmische Physical Society (B.M. Ullrich);

D O I：

10.1016/0167-5087(83)90796-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：173 / 177

页数：5

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