IMPURITY PROFILE BROADENING AND SHIFTS BY ION-BEAM MIXING

被引：28

作者：

PAINE, BM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 10期

关键词：

D O I：

10.1063/1.330072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6828 / 6833

页数：6

共 19 条

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