EVALUATION OF CRYSTALLINE QUALITY OF HETEROEPITAXIAL YTTRIA-STABILIZED ZIRCONIA FILMS ON SILICON BY MEANS OF ION-BEAM CHANNELING

被引：14

作者：

FUKUMOTO, H

IMURA, T

OSAKA, Y

NISHIYAMA, F

机构：

来源：

关键词：

D O I：

10.1063/1.344457

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：616 / 618

页数：3

共 19 条

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