HETEROEPITAXIAL SI FILMS ON YTTRIA-STABILIZED, CUBIC ZIRCONIA SUBSTRATES

被引：34

作者：

GOLECKI, I ^{[1
]}

MANASEVIT, HM ^{[1
]}

MOUDY, LA ^{[1
]}

YANG, JJ ^{[1
]}

MEE, JE ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 06期

关键词：

D O I：

10.1063/1.93982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：501 / 503

页数：3

共 16 条

[1]

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[2] COMPARISON OF SEMICONDUCTING PROPERTIES OF THIN-FILMS OF SILICON ON SAPPHIRE AND SPINEL [J].

CULLEN, GW ;

CORBOY, JF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (10) :1345-1350

[3] MEASUREMENTS OF DEFECTS AND STRAIN IN SOS FILMS AFTER CW AR LASER ANNEALING IN THE LIQUID-PHASE REGIME [J].

GOLECKI, I ;

GLASS, HL ;

KINOSHITA, G ;

MAGEE, TJ .

APPLIED SURFACE SCIENCE, 1981, 9 (1-4) :299-314

[4]

GOLECKI I, UNPUB

[5]

HAGENMULLER P, 1978, SOLID ELECTROLYTES

[6]

Kleitz M., 1981, ADV CERAM, V3, P337

[7] SINGLE-CRYSTAL SILICON ON SAPPHIRE SUBSTRATE [J].

MANASEVIT, HM ;

SIMPSON, WI .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (04) :1349-&

[8]

MANASEVIT HM, 1965, T METALL SOC AIME, V233, P540

[9]

MANASEVIT HM, UNPUB

[10] THERMAL EXPANSION OF YTTRIA-STABILIZED ZIRCONIA [J].

NIELSEN, TH ;

LEIPOLD, MH .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1964, 47 (03) :155-155

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