THE EFFECTS OF OXYGEN, HYDROGEN AND FLUORINE ON THE CONDUCTIVITY OF HIGH-PURITY EVAPORATED AMORPHOUS-SILICON FILMS

被引：8

作者：

ISHIKAWA, J

WILSON, IH

机构：

来源：

关键词：

D O I：

10.1016/0022-3093(81)90193-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：271 / 281

页数：11

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