HYDROGENATED AMORPHOUS-SILICON PRODUCED BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SILANE

被引：43

作者：

MEUNIER, M

GATTUSO, TR

ADLER, D

HAGGERTY, JS

机构：

来源：

关键词：

D O I：

10.1063/1.94324

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：273 / 275

页数：3

共 23 条

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