STICKING OF SPUTTERED PARTICLES TO DIFFERENT SURFACES

被引:25
作者
EMMOTH, B
BERGSAKER, H
机构
关键词
D O I
10.1016/0168-583X(88)90601-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:435 / 437
页数:3
相关论文
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