SURFACE-ANALYSIS BY SPUTTERED NEUTRAL MASS-SPECTROMETRY WITH ELECTRON-BEAM-EXCITED PLASMA

被引：3

作者：

HASHIGUCHI, Y ^{[1
]}

HAYASHI, S ^{[1
]}

OHTSUBO, T ^{[1
]}

KATO, S ^{[1
]}

HAMAGAKI, H ^{[1
]}

HARA, T ^{[1
]}

AOYAGI, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] INST PHYS & CHEM RES,WAKO 35101,JAPAN

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 10期

关键词：

D O I：

10.1002/sia.740141006

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：595 / 597

页数：3

共 6 条

[1]

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[2] NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE [J].

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AOYAGI, Y ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :366-368

[3]

HOFMANN S, 1984, PRACTICAL SURFACE AN

[4] A SPUTTERED NEUTRAL MASS-SPECTROMETER WITH HIGH-CURRENT, LOW-ENERGY ION-BOMBARDMENT [J].

KATO, S ;

HAMAGAKI, M ;

HARA, T ;

AOYAGI, K ;

NAMBA, S ;

HAYASHI, S ;

YASHIRO, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 35 (3-4) :550-554

[5] PERFORMANCE OF A NEW ION OPTICS FOR QUASISIMULTANEOUS SECONDARY ION, SECONDARY NEUTRAL, AND RESIDUAL-GAS MASS-SPECTROMETRY [J].

LIPINSKY, D ;

JEDE, R ;

GANSCHOW, O ;

BENNINGHOVEN, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :2007-2017

[6]

Muller KH, 1983, MIKROCHIM ACTA S, V10, P51

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