NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE

被引：62

作者：

HARA, T

HAMAGAKI, M

SANDA, A

AOYAGI, Y

NAMBA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583904

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：366 / 368

页数：3

共 6 条

[1] NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE
HARA, T
HAMAGAKI, M
SANDA, A
AOYAGI, Y
NAMBA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (03): : L252 - L253
[2] CW AR+ LASER PUMPED BY AN INTENSE ELECTRON-BEAM
HARA, T
SADAMOTO, Y
HAMAGAKI, M
OHGO, T
DOTE, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (07): : L379 - L380
[3] Langmuir I., 1924, GEN ELECTR REV, V27, P538
[4] ENERGY-DEPENDENCE OF THE ION-INDUCED SPUTTERING YIELDS OF MONATOMIC SOLIDS
MATSUNAMI, N
YAMAMURA, Y
ITIKAWA, Y
ITOH, N
KAZUMATA, Y
MIYAGAWA, S
MORITA, K
SHIMIZU, R
TAWARA, H
[J]. ATOMIC DATA AND NUCLEAR DATA TABLES, 1984, 31 (01) : 1 - 80
[5] DISCHARGE AND ION EXTRACTION PROPERTIES OF A BEAM-PLASMA ION-SOURCE
ROSING, MG
CONRAD, JR
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (03) : 816 - 818
[6] Uramoto J., 1977, Journal of the Vacuum Society of Japan, V20, P170, DOI 10.3131/jvsj.20.170