MONTE-CARLO MODELING OF THE PHOTO AND AUGER-ELECTRON PRODUCTION IN X-RAY-LITHOGRAPHY WITH SYNCHROTRON RADIATION

被引:30
作者
MURATA, K [1 ]
KOTERA, M [1 ]
NAGAMI, K [1 ]
NAMBA, S [1 ]
机构
[1] OSAKA UNIV,DEPT ELECT ENGN,TOYONAKA,OSAKA 560,JAPAN
关键词
D O I
10.1109/T-ED.1985.22182
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1694 / 1703
页数:10
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