MONTE-CARLO MODELING OF THE PHOTO AND AUGER-ELECTRON PRODUCTION IN X-RAY-LITHOGRAPHY WITH SYNCHROTRON RADIATION

被引：30

作者：

MURATA, K ^{[1
]}

KOTERA, M ^{[1
]}

NAGAMI, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT ELECT ENGN,TOYONAKA,OSAKA 560,JAPAN

来源：

关键词：

D O I：

10.1109/T-ED.1985.22182

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1694 / 1703

页数：10

共 29 条

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