NEW SURFACE-WAVE LAUNCHERS FOR SUSTAINING PLASMA COLUMNS AT SUBMICROWAVE FREQUENCIES (1-300 MHZ)

被引：55

作者：

MOISAN, M

ZAKRZEWSKI, Z

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1987年 / 58卷 / 10期

关键词：

D O I：

10.1063/1.1139539

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1895 / 1900

页数：6

共 27 条

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[3]

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[6] COMPARISON OF MICROWAVE AND LOWER FREQUENCY DISCHARGES FOR PLASMA POLYMERIZATION [J].

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[7]

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[8]

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[9] THEORY OF A PLASMA-COLUMN SUSTAINED BY A SURFACE-WAVE [J].

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[10] ELECTRON-ENERGY DISTRIBUTIONS AND EXCITATION RATES IN HIGH-FREQUENCY ARGON DISCHARGES [J].

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