ION-BEAM ENHANCEMENT OF METAL-INSULATOR ADHESION

被引:74
作者
BAGLIN, JEE
机构
[1] IBM Almaden Research Center, San Jose, CA 95120-6099
关键词
D O I
10.1016/0168-583X(92)95024-L
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Ion beam mixing and substrate surface tailoring may be used to enhance the adhesion at metal-glass, metal-ceramic and metal-polymer interfaces. Some recent publications on the chemical and structural nature of such bonding are reviewed, with special reference to the roles of interface chemistry and morphology.
引用
收藏
页码:119 / 128
页数:10
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