PALLADIUM-RELATED AND PLATINUM-RELATED LEVELS IN SILICON - EFFECT OF A HYDROGEN PLASMA

被引：57

作者：

PEARTON, SJ ^{[1
]}

HALLER, EE ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期

关键词：

D O I：

10.1063/1.332398

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3613 / 3615

页数：3

共 15 条

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[10]

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