STEP HEIGHT MEASUREMENT USING 2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY

被引：249

作者：

CREATH, K

机构：

来源：

关键词：

D O I：

10.1364/AO.26.002810

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2810 / 2816

页数：7

共 8 条

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