FATIGUE OF MICROLITHOGRAPHICALLY-PATTERNED FREESTANDING ALUMINUM THIN-FILM UNDER AXIAL STRESSES

被引：37

作者：

READ, DT ^{[1
]}

DALLY, JW ^{[1
]}

机构：

[1] UNIV MARYLAND,DEPT MECH ENGN,COLLEGE PK,MD 20742

来源：

JOURNAL OF ELECTRONIC PACKAGING | 1995年 / 117卷 / 01期

关键词：

D O I：

10.1115/1.2792062

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fatigue life as a function of number of stress cycles has been determined for three-layer titanium-aluminum-titanium thin-film specimens. For nominal stresses ranging from 50 to 90 percent of the upper-bound ultimate strength, the fatigue lives ranged up to 76 cycles. In all specimens, active crack were observed after only a few stress cycles. These crack grew with repeated cycling. The fatigue life was reached when the specimen could no longer sustain the maximum cyclic stress.

引用

页码：1 / 6

页数：6

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