ELECTRON-BEAM LITHOGRAPHY WITH MONOLAYERS OF ALKYLTHIOLS AND ALKYLSILOXANES

被引：99

作者：

LERCEL, MJ

REDINBO, GF

PARDO, FD

ROOKS, M

TIBERIO, RC

SIMPSON, P

CRAIGHEAD, HG

SHEEN, CW

PARIKH, AN

ALLARA, DL

机构：

[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

[2] PENN STATE UNIV,DEPT MAT SCI,UNIVERSITY PK,PA 16802

[3] PENN STATE UNIV,DEPT CHEM,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587635

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3663 / 3667

页数：5

共 38 条

[31] SILANATION OF SILICA SURFACES - A NEW METHOD OF CONSTRUCTING PURE OR MIXED MONOLAYERS [J].

SILBERZAN, P ;

LEGER, L ;

AUSSERRE, D ;

BENATTAR, JJ .

LANGMUIR, 1991, 7 (08) :1647-1651

[32] GENERATION OF ELECTROCHEMICALLY DEPOSITED METAL PATTERNS BY MEANS OF ELECTRON-BEAM (NANO)LITHOGRAPHY OF SELF-ASSEMBLED MONOLAYER RESISTS [J].

SONDAGHUETHORST, JAM ;

VANHELLEPUTTE, HRJ ;

FOKKINK, LGJ .

APPLIED PHYSICS LETTERS, 1994, 64 (03) :285-287

[33] SOFT-X-RAY PHOTOCHEMISTRY OF CHEMISORBED SELF-ASSEMBLED MONOLAYERS [J].

SUH, D ;

SIMONS, JK ;

TAYLOR, JW ;

KOLOSKI, TS ;

CALVERT, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2850-2854

[34] MODULATION OF CELL-ADHESION BY MODIFICATION OF TITANIUM SURFACES WITH COVALENTLY ATTACHED SELF-ASSEMBLED MONOLAYERS [J].

SUKENIK, CN ;

BALACHANDER, N ;

CULP, LA ;

LEWANDOWSKA, K ;

MERRITT, K .

JOURNAL OF BIOMEDICAL MATERIALS RESEARCH, 1990, 24 (10) :1307-1323

[35] UV PHOTOPATTERNING OF ALKANETHIOLATE MONOLAYERS SELF-ASSEMBLED ON GOLD AND SILVER [J].

TARLOV, MJ ;

BURGESS, DRF ;

GILLEN, G .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1993, 115 (12) :5305-5306

[36] SELF-ASSEMBLED MONOLAYER ELECTRON-BEAM RESIST ON GAAS [J].

TIBERIO, RC ;

CRAIGHEAD, HG ;

LERCEL, M ;

LAU, T ;

SHEEN, CW ;

ALLARA, DL .

APPLIED PHYSICS LETTERS, 1993, 62 (05) :476-478

[37] STRUCTURE AND REACTIVITY OF ALKYLSILOXANE MONOLAYERS FORMED BY REACTION OF ALKYLTRICHLOROSILANES ON SILICON SUBSTRATES [J].

WASSERMAN, SR ;

TAO, YT ;

WHITESIDES, GM .

LANGMUIR, 1989, 5 (04) :1074-1087

[38] SCANNING ELECTRON-MICROSCOPY FOR IMAGING PHOTOPATTERNED SELF-ASSEMBLED MONOLAYERS ON GOLD [J].

WOLLMAN, EW ;

FRISBIE, CD ;

WRIGHTON, MS .

LANGMUIR, 1993, 9 (06) :1517-1520

← 1 2 3 4 →