共 10 条
[1]
BAUM TH, 1986, Patent No. 4574095
[2]
BLACK JG, 1987, MATER RES SOC S P, V75, P651
[4]
LOCALIZED LASER CHEMICAL-PROCESSING OF TUNGSTEN FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (04)
:843-847
[5]
HAIGH J, 1989, LASER MICROFABRICATI, P453
[7]
MIRACKY RF, 1989, MAT RES S C, V129, P547
[8]
PAN JT, 1988, 8TH INT EL PACK C P, P174
[10]
VANOOIJ WJ, 1983, PHYSICOCHEMICAL ASPE, P1035