SELECTIVE-AREA ELECTROLESS COPPER PLATING ON POLYIMIDE EMPLOYING LASER PATTERNING OF A CATALYTIC FILM

被引:35
作者
HIRSCH, TJ
MIRACKY, RF
LIN, C
机构
关键词
D O I
10.1063/1.103435
中图分类号
O59 [应用物理学];
学科分类号
摘要
A scanned, focused argon ion laser beam is used to locally heat a thin polymer/palladium film applied to a polyimide-coated substrate, thereby reducing chemically bound palladium to palladium metal. The metallic palladium is resistant to a caustic etchant that removes the unirradiated film; the residual patterned palladium then acts as a catalyst for conventional electroless plating. As an alternate patterning method a laser may be used to selectively deposit the thin polymer film on the substrate from a surrounding liquid solution.
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页码:1357 / 1359
页数:3
相关论文
共 10 条
[1]  
BAUM TH, 1986, Patent No. 4574095
[2]  
BLACK JG, 1987, MATER RES SOC S P, V75, P651
[3]   LASER-INDUCED SELECTIVE COPPER DEPOSITION ON POLYIMIDE [J].
COLE, HS ;
LIU, YS ;
ROSE, JW ;
GUIDA, R .
APPLIED PHYSICS LETTERS, 1988, 53 (21) :2111-2113
[4]   LOCALIZED LASER CHEMICAL-PROCESSING OF TUNGSTEN FILMS [J].
GROSSMAN, WM ;
KARNEZOS, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04) :843-847
[5]  
HAIGH J, 1989, LASER MICROFABRICATI, P453
[7]  
MIRACKY RF, 1989, MAT RES S C, V129, P547
[8]  
PAN JT, 1988, 8TH INT EL PACK C P, P174
[9]   A COPPER POLYIMIDE METAL-BASE PACKAGING TECHNOLOGY [J].
TAKASAGO, H ;
ADACHI, K ;
TAKADA, M .
JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (02) :319-326
[10]  
VANOOIJ WJ, 1983, PHYSICOCHEMICAL ASPE, P1035