LASER-INDUCED SELECTIVE COPPER DEPOSITION ON POLYIMIDE

[1] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[2] EHRILICH DJ, 1983, J VAC SCI TECHNOL B, V1, P1969

[3] ESHILDSEN SS, 1985, APPL PHYS LETT, V46, P1101

[4] LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1628 - 1632

[5] LASER-INDUCED SELECTIVE DEPOSITION OF MICRON-SIZE STRUCTURES ON SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05): : 1441 - 1444

[6] LCVD OF COPPER - DEPOSITION RATES AND DEPOSIT SHAPES [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (01): : 1 - 5

[7] OPTICAL-ABSORPTION OF SOME POLYMERS IN THE REGION 240-170 NM [J]. APPLIED PHYSICS LETTERS, 1986, 48 (02) : 192 - 194

[8] SOLANKI R, 1985, SOLID STATE TECHNOL, V6, P220

[9] VAPOR-PRESSURE MEASUREMENTS AND GAS-CHROMATOGRAPHIC STUDIES OF SOLUTION THERMODYNAMICS OF METAL BETA-DIKETONATES [J]. INORGANIC CHEMISTRY, 1972, 11 (09) : 1995 - &

[1] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[2] EHRILICH DJ, 1983, J VAC SCI TECHNOL B, V1, P1969

[3] ESHILDSEN SS, 1985, APPL PHYS LETT, V46, P1101

[4] LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1628 - 1632

[5] LASER-INDUCED SELECTIVE DEPOSITION OF MICRON-SIZE STRUCTURES ON SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05): : 1441 - 1444

[6] LCVD OF COPPER - DEPOSITION RATES AND DEPOSIT SHAPES [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (01): : 1 - 5

[7] OPTICAL-ABSORPTION OF SOME POLYMERS IN THE REGION 240-170 NM [J]. APPLIED PHYSICS LETTERS, 1986, 48 (02) : 192 - 194

[8] SOLANKI R, 1985, SOLID STATE TECHNOL, V6, P220

[9] VAPOR-PRESSURE MEASUREMENTS AND GAS-CHROMATOGRAPHIC STUDIES OF SOLUTION THERMODYNAMICS OF METAL BETA-DIKETONATES [J]. INORGANIC CHEMISTRY, 1972, 11 (09) : 1995 - &