SPUTTERING OF METAL LAYERS DEPOSITED ON GRAPHITE AT ELEVATED-TEMPERATURES

被引:3
作者
HASEBE, Y
KONDOH, K
MORITA, K
机构
关键词
D O I
10.1016/0022-3115(89)90391-7
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:945 / 950
页数:6
相关论文
共 10 条
[1]   ENERGY-DEPENDENCE OF THE ION-INDUCED SPUTTERING YIELDS OF MONATOMIC SOLIDS [J].
MATSUNAMI, N ;
YAMAMURA, Y ;
ITIKAWA, Y ;
ITOH, N ;
KAZUMATA, Y ;
MIYAGAWA, S ;
MORITA, K ;
SHIMIZU, R ;
TAWARA, H .
ATOMIC DATA AND NUCLEAR DATA TABLES, 1984, 31 (01) :1-80
[2]   GRAPHITE AS PLASMA FACING MATERIAL [J].
MIYAHARA, A ;
TANABE, T .
JOURNAL OF NUCLEAR MATERIALS, 1988, 155 :49-57
[3]  
MORITA K, 1980, P S SPUTTERING, P649
[4]  
MORITA K, 1984, J NUCL MATER, V128, P260
[5]  
PHILIPPS V, 1984, J NUCL MATER, V122, P1440
[6]   ON THE INFLUENCE OF IMPURITIES ON THE HIGH-TEMPERATURE SPUTTERING YIELD OF GRAPHITE [J].
ROTH, J ;
BOHDANSKY, J ;
ROBERTO, JB .
JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :534-539
[7]   SPUTTERING AND ION-INDUCED MIXING OF THIN FE LAYERS ON GRAPHITE [J].
SANTANIELLO, A ;
APPELT, J ;
BOHDANSKY, J ;
ROTH, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :80-84
[8]   EROSION YIELD OF TI FROM TIC-DEPOSITED GRAPHITE BY HYDROGEN-ION BOMBARDMENT AT HIGH-TEMPERATURES [J].
SUKENOBU, S ;
GOMAY, Y ;
OHNO, H ;
MORITA, K .
JOURNAL OF NUCLEAR MATERIALS, 1987, 148 (01) :66-71
[9]   METHANE FORMATION AND SURFACE MODIFICATION OF TIC COATING BY HYDROGEN-ION BOMBARDMENT [J].
SUKENOBU, S ;
GOMAY, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :920-923
[10]   EDGE PLASMA-EXPERIMENTS AND MATERIAL SURFACE EFFECTS [J].
TAGLAUER, E .
JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :141-149