SILICON MACH-ZEHNDER WAVE-GUIDE INTERFEROMETERS BASED ON THE PLASMA DISPERSION EFFECT

被引：87

作者：

TREYZ, GV

MAY, PG

HALBOUT, JM

机构：

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 07期

关键词：

D O I：

10.1063/1.105338

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon Mach-Zehnder waveguide modulators have been fabricated and operation characterized at the wavelength of 1.3-mu-m. Device operation is based on the free-carrier-induced change in the refractive index of silicon. Modulation depths of -4.9 dB and response times tau-response < 50 ns have been achieved at lambda = 1.3-mu-m for an injected carrier density of 6.5 X 10(17) cm-3.

引用

页码：771 / 773

页数：3

共 14 条

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