VAPOR-DEPOSITION OF SULFUR-DOPED GAAS LAYERS

被引:7
作者
BACHEM, KH [1 ]
BRUCH, H [1 ]
机构
[1] TECH UNIV AACHEN,INST SEMICONDUCTOR ELECTR,SONDER FORSCH BEREICH FESTKORPER ELEKTR,AACHEN,FED REP GER
关键词
D O I
10.1149/1.2134349
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
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页码:1000 / 1002
页数:3
相关论文
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