SPUTTERING OF METAL TARGETS UNDER INCREASED OXYGEN PARTIAL-PRESSURE

被引：35

作者：

BETZ, G

HUSINSKY, W

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90524-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：343 / 347

页数：5

共 18 条

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MARTINELLI, AP ;

SCHWEER, B ;

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[2]

BETZ G, 1983, TOP APPL PHYS, V52, P11

[3] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :610-613

[4] THE EFFECT OF OXYGEN ON THE SPUTTERING OF METASTABLE ATOMS AND IONS FROM BA METAL [J].

GRISCHKOWSKY, D ;

YU, ML ;

BALANT, AC .

SURFACE SCIENCE, 1983, 127 (02) :315-330

[5] THE DETERMINATION OF THE FLUX-DENSITY OF SPUTTERED ATOMS BY MEANS OF PULSED DYE-LASER EXCITED FLUORESCENCE [J].

HINTZ, E ;

RUSBULDT, D ;

SCHWEER, B ;

BOHDANSKY, J ;

ROTH, J ;

MARTINELLI, AP .

JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :656-663

[6]

HUSINSKY W, 1983, PHYS REV LETT, V50, P1689, DOI 10.1103/PhysRevLett.50.1689

[7] VELOCITY DISTRIBUTIONS AND SPUTTERING YIELDS OF CHROMIUM ATOMS UNDER ARGON, OXYGEN AND CARBON ION-BOMBARDMENT [J].

HUSINSKY, W ;

BETZ, G ;

GIRGIS, I ;

VIEHBOCK, F ;

BAY, HL .

JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :577-582

[8]

HUSINSKY W, J VAC SCI TECHNOL B

[9]

KILMOCK FM, 1983, SURFACE SCI, V124, pL41

[10]

MATSUNAMI N, 1983, IPPJAM32 I PLASM PHY

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