THE EVALUATION OF SOME DISORDER PARAMETERS OF RF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-CARBON FILMS A-C-H

被引：16

作者：

FABISIAK, K

ROZPLOCH, F

WIECZOREK, J

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1988年 / 21卷 / 06期

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D O I：

10.1088/0022-3727/21/6/021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：995 / 998

页数：4

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共 29 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON PREPARED BY GLOW-DISCHARGE TECHNIQUE
ANDERSON, DA
[J]. PHILOSOPHICAL MAGAZINE, 1977, 35 (01): : 17 - 26
[2] AMORPHOUS VERSUS CRYSTALLINE GETE FILMS .2. OPTICAL PROPERTIES
BAHL, SK
CHOPRA, KL
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) : 4940 - &
[3] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA
BERG, S
ANDERSSON, LP
[J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120
[4] BOULITROP F, 1984, SOLID STATE COMMUN, V54, P107
[5] DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON
CODY, GD
TIEDJE, T
ABELES, B
BROOKS, B
GOLDSTEIN, Y
[J]. PHYSICAL REVIEW LETTERS, 1981, 47 (20) : 1480 - 1483
[6] CONDUCTION IN NON-CRYSTALLINE SYSTEMS .5. CONDUCTIVITY, OPTICAL ABSORPTION AND PHOTOCONDUCTIVITY IN AMORPHOUS SEMICONDUCTORS
DAVIS, EA
MOTT, NF
[J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (179): : 903 - &
[7] BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
BUBENZER, A
KOIDL, P
[J]. SOLID STATE COMMUNICATIONS, 1983, 48 (02) : 105 - 108
[8] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION
DISCHLER, B
BUBENZER, A
KOIDL, P
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (08) : 636 - 638
[9] RF PLASMA DEPOSITED AMORPHOUS-CARBON FILMS - ELECTRONIC AND OPTICAL-PROPERTIES
FABISIAK, K
ORZESZKO, S
ROZPLOCH, F
SZATKOWSKI, J
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 99 (01) : 12 - 22
[10] INVESTIGATION OF HYDROCARBON-PLASMA-GENERATED CARBON-FILMS BY ELECTRON-ENERGY-LOSS SPECTROSCOPY
FINK, J
MULLERHEINZERLING, T
PFLUGER, J
SCHEERER, B
DISCHLER, B
KOIDL, P
BUBENZER, A
SAH, RE
[J]. PHYSICAL REVIEW B, 1984, 30 (08): : 4713 - 4718