METALORGANIC CHEMICAL VAPOR-DEPOSITION OF TL2BA2CACU2OX SUPERCONDUCTING THIN-FILMS USING FLUORINATED BETA-DIKETONATE SOURCE REAGENTS

被引：20

作者：

HAMAGUCHI, N

GARDINER, R

KIRLIN, PS

DYE, R

HUBBARD, KM

MUENCHAUSEN, RE

机构：

[1] UNIV CALIF LOS ALAMOS SCI LAB,DIV CHEM & LASER SCI,LOS ALAMOS,NM 87545

[2] UNIV CALIF LOS ALAMOS SCI LAB,DIV MAT SCI & TECHNOL,LOS ALAMOS,NM 87545

[3] UNIV CALIF LOS ALAMOS SCI LAB,CTR EXPLORATORY RES & DEV,LOS ALAMOS,NM 87545

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 20期

关键词：

D O I：

10.1063/1.104156

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting Tl2Ba2CaCu2Ox films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposited on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500°C using fluorinated β-diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785°C and c-axis oriented Tl2Ba2CaCu2Ox films were then formed by annealing in dry at 870°C in the presence of Tl 2O3/Ba2Ca2CuN3O x pellets. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 108 K. Critical current densities as high as 104 A/cm2 were obtained at 90 K.

引用

页码：2136 / 2138

页数：3

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