DETERMINATION OF IMPURITY AND MOBILITY DISTRIBUTIONS IN EPITAXIAL SEMICONDUCTING-FILMS ON INSULATING SUBSTRATE BY C-V AND Q-V ANALYSIS

被引：33

作者：

LEHOVEC, K ^{[1
]}

机构：

[1] UNIV SO CALIF,LOS ANGELES,CA 90007

来源：

关键词：

D O I：

10.1063/1.1655472

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：279 / 281

页数：3

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