OBSERVATION OF OXYGEN ENRICHMENT IN ZIRCONIUM-OXIDE FILMS

被引：49

作者：

KHAWAJA, EE

BOUAMRANE, F

HALLAK, AB

DAOUS, MA

SALIM, MA

机构：

[1] KING FAHD UNIV PETR & MINERALS,RES INST,DIV ENERGY RESOURCES,TANDETRON ACCELERATOR LAB,DHAHRAN 31261,SAUDI ARABIA

[2] KING FAHD UNIV PETR & MINERALS,DEPT PHYS,DHAHRAN 31261,SAUDI ARABIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 03期

关键词：

D O I：

10.1116/1.578775

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A study of the major deposition parameters, including substrate temperature and oxygen partial pressure, affecting the optical quality of electron beam evaporated zirconium oxide films is presented. The films were found to be optically inhomogeneous. Rutherford backscattering spectroscopy and x-ray photoelectron spectroscopy (XPS) revealed that the films had an excess of oxygen. XPS suggested that the excess oxygen may be due to adsorbed water. However, an increase in the oxygen content with oxygen partial pressure indicated that some of the excess oxygen may have been embedded in the films during deposition.

引用

页码：580 / 587

页数：8

共 30 条

[1]

Apparao K. V. S. R., 1986, Indian Journal of Physics, Part A, V60A, P216

[2] MULTIPLE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILM COATING MATERIALS [J].

ARNDT, DP ;

AZZAM, RMA ;

BENNETT, JM ;

BORGOGNO, JP ;

CARNIGLIA, CK ;

CASE, WE ;

DOBROWOLSKI, JA ;

GIBSON, UJ ;

HART, TT ;

HO, FC ;

HODGKIN, VA ;

KLAPP, WP ;

MACLEOD, HA ;

PELLETIER, E ;

PURVIS, MK ;

QUINN, DM ;

STROME, DH ;

SWENSON, R ;

TEMPLE, PA ;

THONN, TF .

APPLIED OPTICS, 1984, 23 (20) :3571-3596

[3] ESCA STUDIES OF NATURALLY PASSIVATED METAL FOILS [J].

BARR, TL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :660-665

[4]

BRIGGS D, 1983, PRACTICAL SURFACE AN, P511

[5] A SEMIAUTOMATIC ALGORITHM FOR RUTHERFORD BACKSCATTERING ANALYSIS [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :227-231

[6] STRUCTURE-RELATED BULK LOSSES IN ZRO2 OPTICAL THIN-FILMS [J].

DUPARRE, A ;

WELSCH, E ;

WALTHER, HG ;

KAISER, N ;

MULLER, H ;

HACKER, E ;

LAUTH, H ;

MEYER, J ;

WEISSBRODT, P .

THIN SOLID FILMS, 1990, 187 (02) :275-288

[7] RELATIONSHIP BETWEEN OPTICAL INHOMOGENEITY AND FILM STRUCTURE [J].

HARRIS, M ;

MACLEOD, HA ;

OGURA, S ;

PELLETIER, E ;

VIDAL, B .

THIN SOLID FILMS, 1979, 57 (01) :173-178

[8]

HEBARD AF, 1986, APPL PHYS LETT, V28, P520

[9] COMPOSITIONS OF DEPOSITED FILMS USING ION-BEAM SPUTTERING ZR WITH REACTIVE OXYGEN [J].

HUANG, NK ;

KHEYRANDISH, H ;

COLLIGON, JS .

MATERIALS RESEARCH BULLETIN, 1992, 27 (02) :239-245

[10] X-RAY PHOTOELECTRON AND AUGER-SPECTROSCOPY STUDY OF COPPER-SODIUM GERMANATE GLASSES [J].

HUSSAIN, Z ;

SALIM, MA ;

KHAN, MA ;

KHAWAJA, EE .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 110 (01) :44-52

← 1 2 3 →