A SIMPLE OPTICAL-DEVICE FOR GENERATING SQUARE FLAT-TOP INTENSITY IRRADIATION FROM A GAUSSIAN LASER-BEAM

被引:47
作者
KAWAMURA, Y
ITAGAKI, Y
TOYODA, K
NAMBA, S
机构
关键词
D O I
10.1016/0030-4018(83)90246-8
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
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页码:44 / 46
页数:3
相关论文
共 8 条
[1]   DEEP UV SUB-MICRON LITHOGRAPHY BY USING A PULSED HIGH-POWER EXCIMER LASER [J].
KAWAMURA, Y ;
TOYODA, K ;
NAMBA, S .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6489-6490
[2]   BEAM QUALITY OF A KRF LASER PUMPED BY AN ANNULAR ELECTRON-BEAM [J].
KAWAMURA, Y ;
SUZUKI, K ;
TOYODA, K ;
NAMBA, S .
OPTICS COMMUNICATIONS, 1982, 43 (02) :134-136
[3]   AN ANNULAR ELECTRON-BEAM FOR LONGITUDINAL ELECTRON-BEAM PUMPED HIGH-POWER LASERS [J].
KAWAMURA, Y ;
TOYODA, K ;
NAMBA, S ;
SUZUKI, K .
APPLIED PHYSICS LETTERS, 1982, 40 (11) :924-925
[4]   EFFECTIVE DEEP ULTRAVIOLET PHOTOETCHING OF POLY(METHYL METHACRYLATE BY AN EXCIMER LASER [J].
KAWAMURA, Y ;
TOYODA, K ;
NAMBA, S .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :374-375
[5]   LOCALIZED LASER ETCHING OF COMPOUND SEMICONDUCTORS IN AQUEOUS-SOLUTION [J].
OSGOOD, RM ;
SANCHEZRUBIO, A ;
EHRLICH, DJ ;
DANEU, V .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :391-393
[6]  
SHAFER D, 1982, OPTICS LASER TECHNOL, V159
[7]   TECHNIQUE FOR GENERATING FOCAL-PLANE FLAT-TOP LASER-BEAM PROFILES [J].
VELDKAMP, WB .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (03) :294-297
[8]  
1982, LASER FOCUS, V43