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HOLLOW-CATHODE ETCHING WITH CF4 GAS-MIXTURES

被引：5
作者：
HORWITZ, CM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期
关键词：
D O I：
10.1116/1.583277
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：419 / 420
页数：2
相关论文
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[7]   VARIABLE-ANGLE DRY ETCHING WITH A HOLLOW-CATHODE [J].
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[8]  
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