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VARIABLE-ANGLE DRY ETCHING WITH A HOLLOW-CATHODE

被引：12
作者：
HORWITZ, CM
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 11期
关键词：
D O I：
10.1063/1.94630
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1041 / 1043
页数：3
相关论文
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