PREPARATION AND PROPERTIES OF GRANULAR ALUMINUM IN PLASMA-POLYMERIZED MATRICES

被引:10
作者
HECQ, M
ZIEMAN, P
KAY, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.572136
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:364 / 365
页数:2
相关论文
共 5 条
[1]   METAL AND SALT CLUSTER FORMATION IN POLYMER-FILMS PRODUCED IN ARGON-C3F8 PLASMAS [J].
BUBECK, C ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :360-361
[2]   TRANSITION TO ZERO DIMENSIONALITY IN GRANULAR ALUMINUM SUPERCONDUCTING FILMS [J].
DEUTSCHE.G ;
FENICHEL, H ;
GERSHENS.M ;
GRUNBAUM, E ;
OVADYAHU, Z .
JOURNAL OF LOW TEMPERATURE PHYSICS, 1973, 10 (1-2) :231-243
[3]  
DILKS A, 1981, ELECTRON SPECTROSCOP, V4, P277
[4]   PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM [J].
KAY, E ;
DILKS, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01) :1-11
[5]   OXYGEN-CONTENT AND OXIDE BARRIER THICKNESS IN GRANULAR ALUMINUM FILMS [J].
ZIEMANN, P ;
HEIM, G ;
BUCKEL, W .
SOLID STATE COMMUNICATIONS, 1978, 27 (11) :1131-1135