AUGER-ELECTRON SPECTROSCOPY AND ELECTRON-ENERGY LOSS SPECTROSCOPY STUDIES OF THE FORMATION OF SILICON-NITRIDE BY IMPLANTING LOW-ENERGY NITROGEN-IONS INTO SILICON

被引：14

作者：

LIESKE, N ^{[1
]}

HEZEL, R ^{[1
]}

机构：

[1] UNIV ERLANGEN NURNBERG,INST WERKSTOFFWISSENSCH 6,D-8520 ERLANGEN,FED REP GER

来源：

THIN SOLID FILMS | 1981年 / 85卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90049-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：7 / 14

页数：8

相关论文

共 17 条

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