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ELASTIC AND INELASTIC ENERGY DEPOSITION DISTRIBUTIONS DURING ION-IMPLANTATION IN SOLIDS

被引：5
作者：
BURENKOV, AF
KOMAROV, FF
TEMKIN, MM
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1983年 / 69卷 / 3-4期
关键词：
D O I：
10.1080/00337578308217821
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：165 / 177
页数：13
相关论文
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