THEORETICAL-ANALYSIS OF SPUTTER PROFILING

被引:7
作者
REMMERIE, J
MAES, HE
机构
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D O I
10.1016/0584-8547(85)80130-0
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
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页码:787 / 793
页数:7
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