THE INTERACTION OF O-2, NO, AND N2O WITH GE SURFACES

被引:14
作者
ENTRINGER, AG
SHINAR, R
SHANKS, HR
机构
[1] Microelectronics Research Center, Iowa State University, Ames
关键词
D O I
10.1016/0039-6028(90)90555-M
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The interaction of molecular oxygen (O2), nitric oxide (NO), and nitrous oxide (N2O) with Ge(111), Ge(111) disordered by sputter-etching, and amorphous Ge (a-Ge) surfaces was studied at room temperature using high-resolution electron energy loss spectroscopy (HREELS), core level and valence band EELS, and Auger electron spectroscopy. The interaction of activated NO, N2O, and N2 molecules with these surfaces was also examined. Results indicate that oxygen originating from O2 bonds to surface and subsurface Ge atoms in a bridge configuration. Penetration is more pronounced at the disordered surfaces resulting in a dilute bridge bonding configuration (+ 1 oxidation state), whereas the + 1 to + 3 oxidation states are observed at the similarly treated Ge(111). The N2O molecules decompose to desorbing N2 molecules and chemisorbed oxygen atoms. In contrast, nitrogen and oxygen are detected by Auger analysis at the NO-exposed surfaces. However, the germanium nitride vibrational modes are identified only after heating these surfaces to ~ 550 ° C. A precursor Ge nitride is observed at room temperature following exposure to nitrogen atoms and ions. Only the + 1 oxidation state is observed for the surfaces exposed to NO and N2O. This behavior is discussed and compared to O2 chemisorption. Electronic EELS of Ge surfaces exposed to activated NO, N2O, and N2 indicate that bonding occurs at the surface dangling bonds. Nitrogen related electronic losses are also identified. © 1990.
引用
收藏
页码:221 / 230
页数:10
相关论文
共 30 条
[1]   DIMER-ADATOM-STACKING-FAULT (DAS) AND NON-DAS (111) SEMICONDUCTOR SURFACES - A COMPARISON OF GE(111)-C (2X8) TO SI(111)-(2X2), SI(111)-(5X5), SI(111)-(7X7), AND SI(111)-(9X9) WITH SCANNING TUNNELING MICROSCOPY [J].
BECKER, RS ;
SWARTZENTRUBER, BS ;
VICKERS, JS ;
KLITSNER, T .
PHYSICAL REVIEW B, 1989, 39 (03) :1633-1647
[2]   NORMAL MODE ASSIGNMENTS IN VITREOUS SILICA, GERMANIA AND BERYLLIUM FLUORIDE [J].
BELL, RJ ;
DEAN, P ;
HIBBINSB.DC .
JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1971, 4 (10) :1214-&
[3]  
DAVIS LE, 1976, HDB AUGER ELECTRON S
[4]   ELECTRON ENERGY-LOSS SPECTRA OF SI(111) REACTED WITH NITROGEN-ATOMS [J].
EDAMOTO, K ;
TANAKA, S ;
ONCHI, M ;
NISHIJIMA, M .
SURFACE SCIENCE, 1986, 167 (2-3) :285-296
[5]   HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROSCOPY - RELATIONSHIP BETWEEN LOSS INTENSITY AND COVERAGE [J].
FROITZHEIM, H ;
KOHLER, U .
PHYSICAL REVIEW B, 1989, 40 (12) :8213-8217
[6]  
GREGORY OJ, 1985, INTEGRATED CIRCUITS
[7]   PHOTOEMISSION YIELD SPECTROSCOPY OF ELECTRONIC SURFACE-STATES ON GERMANIUM (111) SURFACES [J].
GUICHAR, GM ;
GARRY, GA ;
SEBENNE, CA .
SURFACE SCIENCE, 1979, 85 (02) :326-334
[8]   VIBRATIONAL STUDY OF THE INITIAL-STAGES OF THE OXIDATION OF SI(111) AND SI(100) SURFACES [J].
IBACH, H ;
BRUCHMANN, HD ;
WAGNER, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03) :113-124
[9]   ADSORPTION OF ATOMIC OXYGEN (N2O) ON A CLEAN SI(100) SURFACE AND ITS INFLUENCE ON THE SURFACE-STATE DENSITY - A COMPARISON WITH O-2 [J].
KEIM, EG ;
WOLTERBEEK, L ;
VANSILFHOUT, A .
SURFACE SCIENCE, 1987, 180 (2-3) :565-598
[10]   ORIENTATION DEPENDENT ADSORPTION OF OXYGEN ON A CYLINDRICAL GE SAMPLE [J].
KUHR, HJ ;
RANKE, W .
SURFACE SCIENCE, 1988, 201 (03) :408-418