OPTICAL SPECTROSCOPIC STUDY OF INVERTED CYLINDRICAL MAGNETRON SPUTTERING OF YBA2CU3O7-X

被引：17

作者：

XI, XX

WU, XD

INAM, A

LI, Q

HEMMICK, D

FINDIKOGLU, A

VENKATESAN, T

CHANG, CC

HOWARD, R

机构：

[1] BELLCORE,RED BANK,NJ 07701

[2] EG&G PRINCETON APPL RES,PRINCETON,NJ 08543

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 01期

关键词：

D O I：

10.1063/1.104210

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa 2Cu3O7-x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O2 is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa2Cu3O 7-x thin films.

引用

页码：96 / 98

页数：3

共 15 条

[1]

[Anonymous], 1970, TABLES SPECTRAL LINE

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