PLASMA POLYMERIZATION BY MAGNETRON GLOW-DISCHARGE .2. EFFECT OF MAGNETIC-FIELD ON CHEMICAL CHARACTERISTICS OF PLASMA POLYMERS OF TETRAFLUOROETHYLENE REVEALED BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS

被引：9

作者：

SATO, K

YEH, YS

YASUDA, H

机构：

[1] UNIV MISSOURI,DEPT CHEM ENGN,ROLLA,MO 65401

[2] UNIV MISSOURI,GRAD CTR MAT RES,ROLLA,MO 65401

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576333

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3188 / 3196

页数：9

共 14 条

[1] ESCA APPLIED TO POLYMERS .27. PLASMA POLYMERIZATION .2. ESCA INVESTIGATION OF POLYMERS SYNTHESIZED BY EXCITATION OF INDUCTIVELY COUPLED RF PLASMA IN PERFLUOROBENZENE AND PERFLUOROCYCLOHEXANE [J].

CLARK, DT ;

SHUTTLEWORTH, D .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1980, 18 (01) :27-46

[2]

CLARK DT, 1976, STRUCTURAL STUDIES M, P111

[3] ROOM-TEMPERATURE GLOW-DISCHARGE DEPOSITION OF SILICON-OXIDES FROM SIH4 AND N2O [J].

KAGANOWICZ, G ;

BAN, VS ;

ROBINSON, JW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (03) :1233-1237

[4]

KAGANOWITZ G, 1979, 4TH P INT S PLASM CH, P152

[5]

LEATHY MF, 1987, SOLID STATE TECHNOL, V30, P99

[6] ANALYSIS OF FILMS PREPARED BY PLASMA POLYMERIZATION OF ACETYLENE IN A D.C. MAGNETRON [J].

MCKENZIE, DR ;

MCPHEDRAN, RC ;

SAVVIDES, N ;

COCKAYNE, DJH .

THIN SOLID FILMS, 1983, 108 (03) :247-256

[7] PLASMA POLYMERIZATION OF ETHYLENE BY MAGNETRON DISCHARGE [J].

MOROSOFF, N ;

NEWTON, W ;

YASUDA, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (06) :1815-1822

[8] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE .3. CAPACITIVE AUDIO FREQUENCY (10 KHZ) AND AC DISCHARGE [J].

MOROSOFF, N ;

YASUDA, H ;

BRANDT, ES ;

REILLEY, CN .

JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (12) :3471-3488

[9]

MOROSOFF N, 1979, ACS SYM SER, V108, P163

[10]

ROSS DL, 1978, RCA REV, V39, P136

← 1 2 →