ELECTRICAL-PROPERTIES OF GALLIUM-DOPED ZINC-OXIDE FILMS PREPARED BY RF-SPUTTERING

被引：11

作者：

CHOI, BH ^{[1
]}

IM, HB ^{[1
]}

SONG, JS ^{[1
]}

机构：

[1] KOREA INST ENERGY & RESOURCES, TAEJON, SOUTH KOREA

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1990年 / 73卷 / 05期

关键词：

electrical properties; films; gallium; sputtering; zinc oxide;

D O I：

10.1111/j.1151-2916.1990.tb05203.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ga‐doped polycrystalline ZnO films on glass substrates were prepared by sputtering the targets, which had been prepared by sintering disks consisting of ZnO powder and various amounts of Ga2O3, to investigate the effects of gallium doping and sputtering conditions on electrical properties. Optimizing the RF power density, argon gas pressure, and gallium content, transparent Ga‐doped ZnO films with resistivity less than 10−3Ω·cm were obtained. Electron concentrations for undoped and Ga‐doped ZnO films were on the order of 1018 and 1021/cm3, respectively. The Ga‐doped ZnO films became degenerate when the electron concentration exceeded ∼ 1019/cm3, and the optical band gap increased with increasing carrier concentration because of the increase of Fermi energy in the conduction band. Copyright © 1990, Wiley Blackwell. All rights reserved

引用

页码：1347 / 1350

页数：4

共 12 条

[1] ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].

BURSTEIN, E .

PHYSICAL REVIEW, 1954, 93 (03) :632-633

[2]

CHAPMAN B, 1980, GLOW DISCHARGE PROCE, P213

[3] EBIC ANALYSIS OF CUINSE2 DEVICES [J].

CHESAREK, W ;

MITCHELL, K ;

MASON, A ;

FABICK, L .

SOLAR CELLS, 1988, 24 (3-4) :263-270

[4]

CHU TL, 1987, 19TH P IEE PHOTOVOLT

[5]

Fahrenbruch A.L., 1983, FUNDAMENT SOLAR CELL, P49

[6] EFFECTS OF THICKNESS AND SINTERING CONDITIONS OF CDS FILMS ON THE PHOTOVOLTAIC PROPERTIES OF CDS/CDTE SOLAR-CELLS [J].

JUN, YK ;

IM, HB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (07) :1658-1661

[7] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

MINAMI, T ;

NANTO, H ;

TAKATA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L280-L282

[8] PHOTOVOLTAIC PROPERTIES OF CDS/CDTE SOLAR-CELLS SINTERED WITH CDCL2 [J].

MOON, JT ;

PARK, KC ;

IM, HB .

SOLAR ENERGY MATERIALS, 1988, 18 (1-2) :53-60

[9] SCREEN PRINTED THIN-FILM CDS-CDTE SOLAR-CELL [J].

NAKAYAMA, N ;

MATSUMOTO, H ;

NAKANO, A ;

IKEGAMI, S ;

UDA, H ;

YAMASHITA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (04) :703-712

[10] TIN-DOPED AND INDIUM-DOPED ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

QIU, CX ;

SHIH, I .

SOLAR ENERGY MATERIALS, 1986, 13 (02) :75-84

← 1 2 →